Cleanroom grade standards and specifications have their own standards in economically and technologically developed countries and regions, and all specify the relevant cleanliness grades.
For example: the United States, Japan, Western Europe, Northern Europe, Russia, etc. my country promulgated the "Cleanroom Design Specifications" (GBJ73-84) in 1984, and the specification was greatly revised in 1996. In 1990, the "Cleanroom Construction and Acceptance Specifications" (JGJ71-90) was promulgated as an important document to guide construction and acceptance. At present, the specification is being revised.
Cleanliness grades specified in GBJ73-84
Grade Number of dust particles > 0.5μm per cubic meter (liter) of air Number of dust particles > 5μm per cubic meter (liter) of air
Cleanliness level specified in GBJ73-84Level
| level | Number of dust particles >0.5um per cubic meter (liter) of air | Number of dust particles >5um per cubic meter (liter) of air |
100 | <35*100((3.5) | |
1000 | <35*1000((35) | <250 ((0.25) |
10000 | <35*10000((350) | <2500 ((2.5) |
| 100000 | <35*100000((3500) | <25000 (〈25) |
Cleanliness level in US Federal Standard FS209E
Level Name | Level Limit | ||||||||||
0.1um | 0.2um | 0.3um | 0.5um | 5um | |||||||
| Dust holding unit | Dust holding unit | Dust holding unit | Dust holding unit | Dust holding unit | |||||||
International units | Imperial Units | m3 | Ft3 | m3 | Ft3 | m3 | Ft3 | m3 | t3 | m3 | Ft3 |
M1.0 | 1 | 350 | 9.91 | 75.7 | 2.14 | 30.9 | 0.875 | 10 | 0.283 | ||
M1.5 | 1240 | 35.0 | 265.0 | 7.5 | 106 | 3 | 35.3 | 2.83 | |||
M2.0 | 10 | 3500 | 99.1 | 757 | 21.4 | 309 | 8.75 | 100 | 28.3 | ||
M2.5 | 12400 | 350.0 | 2650 | 75 | 1060 | 30 | 353 | 100 | |||
M3.0 | 100 | 35000 | 991.0 | 7570 | 214 | 3090 | 87.5 | 1000 | 283 | ||
M3.5 | 26500 | 750 | 10600 | 300 | 3530 | 1000 | |||||
M4.0 | 1000 | 75700 | 2140 | 30900 | 875 | 10000 | 2830 | ||||
M4.5 | 35300 | 10000 | 247 | 7 | |||||||
M5.0 | 10000 | 100000 | 28300 | 618 | 17.5 | ||||||
M5.5 | 353000 | 100000 | 2470 | 70 | |||||||
M6.0 | 100000 | 1000000 | 283000 | 6180 | 175 | ||||||
M6.5 | 3530000 | 100000 | 24700 | 700 | |||||||
| M7.0 | 1000000 | 10000000 | 283000 | 61800 | 1750 | ||||||
Cleanliness levels in NASA standard NHB5340.2
| Biological clean room standards | dust | Bioparticles | Pressure | Temperature | Humidity | Airflow | Illuminance | ||
| Particle diameter （μm） | (pieces/L) | Floating volume (pieces/L) | Floating volume (pieces/m2 per week) | mmH2O | ℃ | % | Ventilation frequency | LX | |
| 100 | ≥0.5 | ≤3.5 | ≤0.0035 | 12900 | ≥1.25 | Specified number | 40-45 | 1000-1620 | |
| 10000 | ≥0.5 ≥5.0 | ≥350 ≥2.3 | ≤0.0176 | 64600 | ≥1.25 | ||||
| 1000000 | ≥0.5 ≥5.0 | ≥3500 ≥23 | ≤0.0884 | 323000 | ≥1.25 | ||||
Cleanliness levels in Japanese Industrial Standard JISB-9920-1989
