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With the rapid development of science and technology, the Semiconductor industry has become an important force driving innovation in modern Electronic products. As a key facility in the semiconductor manufacturing process, the clean room assumes an important role in ensuring a clean and stable production environment and controlling product quality. In this paper, the development of the semiconductor industry status quo, the role of the clean shed and its basic requirements are elaborated.
First, the development of the semiconductor industry status quo
Semiconductor industry is the cornerstone of modern electronic technology, its application in information technology, communications, consumer electronics, automotive electronics and other fields is becoming increasingly widespread. According to market research, the global semiconductor market is growing at a double-digit annual rate, especially driven by emerging areas such as 5G, artificial intelligence and the Internet of Things, the industry's demand for high-performance, high-reliability products continues to climb. This trend has prompted manufacturers to introduce more stringent clean management standards in the production process to address the impact of the micro-environment on product performance and yield.
Second, the role played by the clean room in the development of the semiconductor industry
Clean room is an enclosed space designed to control airborne particles, temperature, humidity and other environmental parameters. Its development in the semiconductor industry plays an important role in the following:
control of contamination
clean shed through a highly efficient air filtration system to reduce the presence of aerosols, dust and micro-organisms to prevent contamination of semiconductor materials and products, thereby improving product yields.
Environmental stability
The modular clean room can accurately control the temperature and humidity to provide stable environmental conditions for semiconductor production, ensuring consistency and repeatability in the production process.
Process safety
the production process in the clean room can effectively reduce the risk of static electricity and chemical substances, thereby improving work safety and protecting the safety of operators and equipment.
Third, the semiconductor industry, the basic requirements of the clean shed
In order to meet the stringent requirements of semiconductor production, the clean room needs to follow a series of basic standards and specifications.
1. Commonly used semiconductor industry clean room cleanliness level requirements
Cleanroom cleanliness levels are usually categorized according to the international standard ISO 14644. For the semiconductor industry, the commonly used cleanliness classes are:
ISO1: For processes with very high cleanliness requirements, such as photolithography and ion implantation.
ISO5: Suitable for most chip manufacturing processes, such as cleaning and coating.
ISO6: Suitable for auxiliary processes with lower cleanliness requirements, such as packaging and testing.
2. Semiconductor cleanroom Temperature and Humidity Requirements
The control of temperature and humidity is critical in the semiconductor manufacturing process. The general requirements are as follows:
Temperature: The temperature in the cleanroom should be maintained between 20°C and 25°C to avoid the effects of temperature fluctuations on process parameters.
Humidity: Relative humidity is usually controlled between 30% and 50% to prevent static buildup and material moisture absorption.
3. Common types of Semiconductor clean rooms
Common types of clean booths in the semiconductor industry include:
Vertical Flow Cleanroom: A top-down airflow design that ensures uniform distribution of Clean air for applications with high cleanliness requirements.
Cross-flow clean booths: air flows from both sides to the center, suitable for larger areas of clean space, suitable for general semiconductor production processes.
Mobile clean room: easy to use and flexible, suitable for the process of frequent adjustment of the position of the needs of the process.
Summarize
The rapid development of the semiconductor industry has put forward higher requirements for the cleanliness of the production environment. As a key facility, the clean room not only controls contamination and guarantees product quality, but also supports a stable production environment. With the advancement of technology, the design and function of the clean shed will continue to be optimized, providing a boost to the further development of the semiconductor industry.
