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How to build an ISO 5 clean room

  • Author:Jason Peng

  • Cleanroom Engineering Technology Manager of Deiiang Company.

    Product R&D Manager of GDC Inc. Cleanroom Equipment Manufacturing Company.

    Executive Director of Guangdong Cleanroom Industry Association of China.

    Engaged in R&D of related products for 15 years, with rich relevant technical experience

  • 2024-11-08  |  Visits:

ISO 5 clean shed is a controlled environment with high cleanliness. It is widely used in industries such as microElectronics, pharmaceuticals, and food processing. It has strict requirements for the control of particle concentration in the air. In order to ensure that the ISO 5 clean room can meet the standard requirements, the construction process must strictly follow a series of design and installation specifications. This article will introduce in detail how to build an ISO 5 clean shed, from installation requirements, basic construction to final acceptance and commissioning.

  • List of relevant standards and specifications

  • ISO 14644-1: Air cleanliness levels for clean rooms and related controlled environments

  • ISO 14644-4: Design and construction requirements for clean rooms

  • GB/T 14295: Technical requirements for high-efficiency Air Filters (HEPA)

  • GB 50054: Design specifications for low-voltage electrical installations

  • iso 14644-7: Operation and maintenance requirements for clean rooms and related environments

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1. Clean shed installation requirements

The selection of the installation site of the clean shed is crucial. According to the ISO 14644-4 standard, the clean shed should be installed in a dry, ventilated and well-lit environment, avoiding direct sunlight to prevent indoor temperature and humidity fluctuations from affecting air cleanliness. In addition, the installation environment of the clean shed must also consider special requirements such as anti-static and anti-corrosion according to industry needs. For example, in a Semiconductor manufacturing environment, the clean shed should have an anti-static design to prevent static electricity from damaging sensitive components. The temperature and humidity of the environment should be strictly controlled. Usually the temperature should be maintained at 20-24℃ and the humidity should be maintained at 30-60%.

  • iso 14644-4 standard

    Environmental control requirements for clean areas

  • Temperature and humidity control

    temperature 20-24℃, humidity 30-60%

  • Special requirements

    anti-static, anti-corrosion and other designs

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2. Foundation construction

The foundation construction of the clean shed is the most basic step in the entire installation process. According to the design requirements, the foundation must be flat, solid and level to ensure the stability and sealing of the clean shed. After the foundation construction is completed, a strict acceptance should be carried out to check the flatness and bearing capacity of the foundation to ensure that it meets the bearing requirements. Before installing the clean shed frame, the foundation acceptance must be passed to ensure the firmness of the entire structure. Generally, the construction error of the foundation should be controlled within ±5mm to avoid uneven settlement causing deformation of the frame or affecting the cleanliness of the room.


3. Frame installation

The frame of the clean shed is usually made of steel, and its structure requires high pressure resistance and corrosion resistance. During the frame installation process, the verticality and horizontality should be strictly ensured to ensure the stability and sealing of the clean room. During installation, use a high-precision level and plumb meter for measurement, and the error should be controlled within 1mm/m. After the frame is installed, it is also necessary to carry out anti-corrosion and anti-rust treatment, especially in a humid environment. This step is crucial. The anti-corrosion coating should comply with the GB/T 5270 standard to ensure that the frame is not affected by the environment for a long time.

Clean room construction


4. Ceiling and wall panel installation

The ceiling and wall panels are the external structure of the clean room, which play an air isolation and protection role. In the ISO 5 Clean room, the ceiling and wall panels should be made of materials that meet the clean requirements, such as purification panels, aluminum-plastic panels or stainless steel panels. These materials should have good sealing, flatness and anti-pollution capabilities. During the installation process, ensure that the joints between the panels are tight to avoid gaps or holes to prevent air leakage and affect the negative pressure and cleanliness effect in the clean room. During installation, special attention should be paid to the waterproof and fireproof properties of the panels to ensure that the clean room can operate safely and stably for a long time.


5. Air purification system installation

The air purification system is one of the most critical parts of the ISO 5 clean room. The main components of the system include high-efficiency air filters (HEPA), air showers, ultraviolet disinfection lamps, etc. All equipment should be strictly installed according to design requirements. High-efficiency filters (HEPA) are used to filter tiny particles in the air and must comply with GB/T 14295 standards. The filtration efficiency should reach more than 99.99%, especially the filtration effect of 0.3μm particles. The design of the air shower should ensure that dust particles attached to the surface of clothing can be effectively removed when personnel enter the clean room. During installation, the connection between the components should be tight to avoid air leakage and maintain the negative pressure environment in the clean room.

  • HEPA filter

    filtration efficiency ≥99.99%

  • Air shower design

    in accordance with ISO 14644-7 standards

  • Ultraviolet disinfection lamp

    regular replacement to ensure disinfection effect

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6. Electrical system installation and grounding treatment

The electrical system of the clean room includes power supply, lighting, purification Equipment and control system, etc., which must comply with relevant national standards and industry requirements during installation. The electrical system should ensure the stability and safety of the power supply to avoid the operation of the clean room due to voltage fluctuations or equipment failure. Especially in humid environments, the grounding treatment of the electrical system is crucial. The grounding construction must follow the GB 50054 standard to ensure the safe operation of the equipment inside the clean room and reduce the impact of static electricity on sensitive equipment.

  • Electrical installation standards

    in line with national electrical safety regulations

  • Grounding standards

    GB 50054 requirements

  • Static electricity protection

    especially for the microelectronics industry

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7. Acceptance and commissioning

After the installation of the clean room is completed, acceptance and commissioning must be carried out to ensure that all facilities meet the design requirements. The acceptance content includes the structural safety of the clean room, the operation effect of the air purification system, the stability of the lighting and electrical systems, etc. By using equipment such as particle counters and anemometers for testing, ensure that the particle concentration inside the clean room meets the ISO 5 standard, that is, the concentration of 0.5μm particles per cubic meter of air does not exceed 3,520. During the commissioning process, parameters such as air flow, temperature and humidity control should also be adjusted to ensure the long-term stability of the system.



By following the above standards and requirements, the construction of ISO5 clean rooms can be successfully completed and meet the strict clean environment requirements.

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