1. Before measuring the air humidity and relative humidity in the clean room, the purification Air conditioning system should have been running continuously for at least 24 hours. For places with constant temperature requirements, according to the requirements of the relative temperature and Relative humidity fluctuation range, the measurement should be carried out continuously for 8-48 hours, and the interval between each measurement should not exceed 30mm.
2. According to the temperature and relative humidity fluctuation range, the corresponding instrument with sufficient accuracy should be selected for measurement.
3. The measurement points in the clean room are generally arranged at the following locations:
Supply and return air outlets;
Representative locations in the constant temperature working area (such as around the process equipment or at equal distances);
Center of the room (for systems without constant temperature requirements, temperature and humidity are only measured at this point):
At the sensitive element
All measurement points should be at the same height, 0.8m above the ground. They can also be arranged on several planes above the ground according to the size of the constant temperature zone. The distance between the measurement point and the outer wall surface should be greater than 0.5m.
4. The number of measurement points is determined according to the attached table.
Fluctuation range | Room area ≤ 50m2 Every additional 20-50m2 |
±0.5~±2℃ ±5~±10%RH | Increase 3-5 |
≤|05|℃ ≤|5|%RH | The point spacing should not be greater than 2m, and the number of points should not be less than 5 |
Detection of noise in clean rooms
1. The noise measuring instrument is a sound level meter with an octave analyzer. Generally, only the A sound level is measured, and the octave sound pressure level is measured when necessary.
2. Measurement point location: It is advisable to set the points according to the attached figure. For those with an area of 15m2 or more, a point in the center of the room can be used; the height of the measurement point is 1.1m from the ground.