Electronic clean room air conditioning and ventilation system test solution

Introduction

In order to smoothly hand over the system to the owner and its acceptance standards, this plan is developed. The outline of this plan is as follows:

(1) Test method

(2) Test standard

(3) Test form

Time

Test conditions and procedures

1. Clean room test standard

• Outdoor conditions: Summer: 35℃CDB, 70% Winter: -5CDB, 50%RH

• Indoor conditions: Clean room: temperature 23+2℃, humidity 50+5% RH: Noise: below 65DBA

2. clean room inspection test procedures

(1) Test sequence and time:

(2) Check the test equipment and test location:

A. Wind speed and air volume test

• This test plan is to confirm whether the total indoor air volume and wind speed meet the regulatory requirements.

• Testing instrument.Anemometer test with a calibrated validity period of one year.

• Testing point: The testing point is located 300mm below the main air duct and high-efficiency filter, and each filter is tested at six points. The testing instrument must be supported by an appropriate stand or fixed by an extension frame during testing.

• Acceptance criteria:The outlet air velocity of each filter must be higher than the designed air volume specification.

Note: The designed air volume of each air outlet of this project is about 1500m/h.

B. Cleanliness (dust volume)

(a) This test is to prove that the cleanliness meets the requirements of the clean room specification.

(b) Testing instrument:

Aster particle counter-0.3umx1cfm testing instrument test

(c) Testing method: The cleanliness of each non-seat room must be tested with the Laster particle counter.

• Testing point: According to the FS 209E turbulent clean room standard, the number of test points N = (total floor area) / (square root of cleanliness level), the height is the elevated floor / 1,100mm height from the floor, and the test time for each test point is one minute.

• The testing instrument must be supported by the above appropriate stand or fixed with an extension frame during testing.

(d) Acceptance standard: FS 209E dust control

(e) Test area (level 100K)

Cleanroom cleanliness dust detection standard

C. indoor pressure

(a) This test ensures that the clean room is maintained at a positive pressure state according to the requirements of Party A.

(b) Testing instrument:The testing instrument must be calibrated and valid for one year, and a 0~60Pa scale type pressure gauge is used.

(c) Test method:

• Testing point: three-point test.The test point is to place a test tube in the clean room and an outdoor test tube as a pressure difference to generate data.

• The outdoor atmospheric pressure is assumed to be 0.0mmAg pressure.

• The exhaust volume of the exhaust system under normal operation during the operation stage is adjusted to a balanced state.

• Acceptance standard: The pressure test result must be greater than 210Pa.

D. Temperature and humidity

(a) This test is to confirm that the temperature and humidity in the clean room are within the required range.

(b) Testing instruments

• PC thermometer or equivalent with a testing accuracy of +0.5℃.

• Electronic hygrometer or equivalent with a testing accuracy of +2.

• All testing instruments must be calibrated and valid for one year.

• Calibration documents must be attached before or when delivering the report.

(c) Testing methods

• Take one point in each area of the clean room and place it at a height of 1,100mm above the floor.

• Each testing point must be tested for at least 10MIN.

• Testing points: 5 points in the clean room, 2 points in the special gas room, and 2 points in the laboratory. (d) Acceptance criteria: The testing and monitoring data must be within the specification requirements. The design values of this project are: temperature 23+2℃, humidity 40-60%RH.