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1. Introduction
1.1 Scope
All persons, machines, equipment, articles, raw materials, products, etc. entering the clean room are subject to the control scope of this specification.
1.2 Purpose
In order to maintain the cleanliness of the clean room, control the pollution sources and control the environmental parameters, the persons, machines, equipment, articles, raw materials, etc. in the clean room are controlled to ensure that the cleanliness of the clean room meets the requirements of the product process and improve the product quality.
(Figure 1: Cleanroom Management)
2. Reference Document
U.S. Federal Standard 209D (U.S. FEDERAL STANDARD 209D) MS-5103 GUIDANCE FOR OPERATION OF CLEAN ROOM.
3. Definition
Except for the following terms, this specification is in accordance with JSZ8122 (Contamination Control Terminology). Clean room Particles are controlled within the specified value. Generally speaking, particles refer to solid or liquid substances with a particle size of 0.001 to 1000μm.
4. Clean room management standard procedures
4.1 Clean room cleanliness level classification and area definition
4.1.1 Front-end panel factory
Area A (Class 100): including yellow light room and assembly room.
Area B (Class 1000): other front-end panel production areas except areas A and C.
Area C (Class 10000): including film projection room.
4.1.2 Back-end panel factory
Area D (Class 1000): back-end panel clean room (liquid crystal injection room).
Area E (Class 1000): back-end panel patch area (inside Clean Booth).
Area F (Class 10000): back-end panel general area.
4.1.3 Module workers
G zone (Class 1000): module dust-free rate (C0G room).
H zone (Class 1000): module cleaning area (inside Clean Booth).
I zone (Class 10000): module general area.
4.2 Provisions for wearing and using dust-free clothes/shoes/hats
4.2.1 Classification of dust-free clothes
One-piece dust-free clothes: Class 100, white, apple green, blue, green, light yellow (blue for engineers, green for construction and uncertified personnel, light yellow for guests).
Shawl-style dust-free clothes: Class 1000, white, blue, light yellow (blue for engineers, light yellow for guests).
Coat-style antistatic robes: Class 10000, white, blue, light yellow (blue for engineers, light yellow for guests).
4.2.2 Classification of dust-free shoes
Long-type dust-free shoes: Class 100, white, apple green, blue, green, yellow (blue for engineers, green for construction and uncertified personnel, yellow for guests)
Open-hole electrostatic shoes: Class 10000, white (guests use non-woven shoe covers).
4.2.3 Classification of dust-free hats
One-piece dust-free hats: Class 100, white, apple green, blue, green, yellow (connected with dust-free clothes).
Shawl-type dust-free hats: Class 1000, white, blue, yellow, pink, light red, dark red (blue for engineers and technicians, yellow for guests, pink for QC, light red for material personnel in the manufacturing department, and dark red for team leaders in the manufacturing department).
Butterfly dust-free hat: Class 1000, white, blue, yellow, pink, light red, dark red (blue for engineers and technicians, yellow for guests, pink for QC, light red for material personnel in the manufacturing department, and dark red for team leaders in the manufacturing department).
(Figure 2: cleanroom dust-free clothing)
4.2.4 Dust-free clothing wearing regulations for each area
A and B areas:
Management and production staff must wear white or apple green one-piece dust-free clothing, long dust-free shoes, mesh hats, masks and gloves when working in areas A and B.
Process, equipment and R&D personnel must wear blue one-piece dust-free clothing, shawls, long dust-free shoes, mesh hats, masks and gloves when working in areas A and B.
Quality control personnel must wear pink one-piece dust-free clothing, long dust-free shoes, mesh hats, masks and gloves when working in areas A and B.
Construction and uncertified personnel must wear green one-piece cleanroom suits, long cleanroom shoes, mesh caps, masks and gloves.
Guests must wear yellow one-piece cleanroom suits, capes, long cleanroom shoes, mesh caps, masks and gloves.
Area D, G:
Management, production, quality control and other staff must wear white or blue cape-style cleanroom suits, capes, long cleanroom shoes, mesh caps, masks and gloves (material staff use light red capes, manufacturing team leaders use dark red capes, technicians use blue capes, and quality control uses pink capes).
Process, equipment and R&D personnel must wear blue cape-style cleanroom suits, capes, long cleanroom shoes, mesh caps, masks and gloves.
Guests wear yellow shawl-style dust-free clothing, shawl hats, long dust-free shoe covers, net hats, masks and gloves.
Areas C, F, H, and I:
Management, production, quality control and other staff must wear white or blue coat-style anti-static robes, butterfly hats, and open-hole dust-free shoes (material staff use light red butterfly hats, manufacturing team leaders use dark red butterfly hats, technicians use blue butterfly hats, and quality control uses pink butterfly hats).
Process, equipment and R&D personnel wear blue coat-style anti-static clothing, butterfly hats, and open-hole dust-free shoes.
Guests wear Dong-colored coat-style anti-static robes, butterfly hats, and non-woven shoe covers for guests.
4.2.5 Cleaning and changing regulations for clean clothes
Clean clothes must be cleaned regularly every two weeks, and are cleaned uniformly by outsourced professional laundry factories and sent back to the factory to maintain the cleanliness of clean clothes.
4.2.6 Damage and repair of cleanroom clothing
If A CleanRoom clothing is damaged, the zipper is damaged, the elastic band is loose, the magic sticky tape falls off, etc., the clothing should be stopped from use immediately. If it can be repaired, it should be placed in the repair area. If it cannot be repaired, it should be scrapped and a new one should be used.
4.3 Obtaining the qualification to enter the cleanroom
4.3.1 General employees: Those who often work in the cleanroom or enter the cleanroom from time to time should first take the "Cleanroom Management Standards" or other related courses by the manufacturing department, and pass the examination before they are qualified to enter and exit the cleanroom. Those who pass the examination will be registered and managed by the manufacturing department, and then they can receive cleanroom clothing and other related items from the manufacturing department.
4.3.2 Senior managers: After being familiar with and understanding the cleanroom management standards and other relevant regulations, they are qualified to enter and exit the cleanroom. (Senior manager definition: refers to the chairman, general manager, deputy general manager, etc.)
4.3.3 Guests (manufacturers): The reception department should have the clean room entry and exit qualifications, and explain the various regulations and precautions in the clean room first, and then they can enter the clean room accompanied by relevant personnel.
4.3.4 Clean room entry qualification acquisition process:
4.4 Cancellation of clean room entry qualifications
If the following situations occur, the clean room entry qualification will be cancelled:
4.4.1. When the employee resigns or the leave of absence period exceeds 3 months.
4.4.2. The cumulative violation of the clean room management regulations or other relevant regulations within 1 month is registered by the quality control or audit personnel for 2 times (inclusive) or more.
4.4.3 Violation of the clean room management regulations or other relevant regulations is serious.
4.4.4 When the clean room management regulations or other relevant regulations are significantly modified and re-certification is required.
4.5 Clean Room Qualification Examination
Pre-exam preparation: Before the exam, the Manufacturing Department shall give a unified lecture on clean room management regulations and other related regulations.
Test papers: There are 4 test papers in total, A, B, C, and D. Each paper consists of 15 multiple-choice questions and 10 true-or-false questions, each worth 4 points, and the score is calculated without deduction.
Exam time: 10 minutes.
Passing score: 80 points.
Re-examination regulations: Those who fail the first test can retake the test after attending the class. If they still fail, they will not be qualified to work in the clean room.
4.6 Clean room entry and exit control regulations
4.6.1 Personnel restrictions
(1) Company employees: Those who must work in the clean room due to job requirements must first take the "Clean Room Management Regulations" and other clean room-related regulations courses and pass the examination before they can enter the clean room.
(2) Non-employees: In order to maintain the cleanliness requirements of the clean room and avoid unnecessary interference with production operations to ensure product quality, except for the following circumstances, no one is allowed to visit the clean room.
(3) Non-employees must be accompanied by the receptionist or relevant department personnel when entering the clean room.
(4) Application procedure for guests to enter the clean room: When a guest needs to enter the clean room, the receptionist or relevant department personnel should apply to the head of the manufacturing department and can enter the clean room only after approval.
(5) Guests must swipe their card to enter the clean room.
Note: People with the following health conditions or physical conditions are generally not allowed to enter the clean room.
People with skin problems due to sun exposure, eczema, or burns.
People who are allergic to chemical fibers.
People who are allergic to chemical agents such as solvents.
People who sweat easily or have sweaty hands.
People who are prone to runny noses or often have discharge from their noses.
People who often cough, sneeze, or suffer from asthma.
People who have the habit of scratching frequently.
People who have mental illness, neurosis or closed-door phobia.
(Figure 3: Entering and exiting the clean room)
4.6.2 Restrictions on items
(1) All items that are not used for production or work are prohibited from being brought into the clean room.
(2) Paper items (not clean paper) on the front of the panel are prohibited from being brought into the clean room. If they must be brought in, they must be sealed or covered with plastic.
(3) The following items are prohibited from being brought into the clean room: pencils, erasers, correction fluid (correction tape) and other stationery that are easy to generate dust or evaporate (only in A, B, C, D, G areas), ordinary paper, cartons, ordinary notebooks, paper loose-leaf books, etc. (only in A, B, C areas). Wooden items that do not have polyethylene or other materials on the surface.
Iron items that have not been rust-proofed and are rusty.
Dirty or rusty items.
Styrofoam items (only in A, B, C, D, G areas)
Other items that are easy to pollute the environment or produce particles.
(4) Before bringing items into the clean room, they must be wiped clean before they can be brought into the clean room.
4.7 Procedures for entering the clean room
4.7.1 Procedures for personnel to enter the clean room (CR).
4.7.2 Procedures for items to enter the clean room.
4.7.3 Procedures for instruments and equipment to enter the clean room.
4.8 Procedures for wearing clean clothes
4.8.1 Procedures for wearing one-piece clean clothes: (the procedure for taking off clothes is the opposite)
4.8.2 Procedures for wearing shawl-style clean clothes: (the procedure for taking off clothes is the opposite)
4.8.3 Procedures for wearing coat-style anti-static robes: (the procedure for taking off clothes is the opposite)
4.9 Steps for wearing cleanroom clothing
4.9.1 Steps for wearing one-piece cleanroom clothing
Put on a mesh cap
First make sure the front of the clothing is facing forward and put on both sleeves
Put it on your head, exposing your face
Put on your trouser legs
Pull the zipper from one end to the other under your crotch (the zipper opening must not be exposed and must be covered by long cleanroom shoes)
Put on cleanroom shoes
Fix the Velcro on your head
Put on a mask and fasten the Velcro on your neck
4.9.2 Steps for wearing a shawl-style cleanroom clothing
Put on a mesh cap
Put on a shawl cap
Put on the cleanroom clothing (the shawl edge must be covered by the cleanroom clothing) and zip up and fasten the collar button
Put on cleanroom shoes
4.9.3 Steps for wearing a coat-style anti-static clothing
Put on a coat-style anti-static clothing
Put on anti-static shoes
Put on a butterfly cap
4.10 Notes for wearing cleanroom clothing
(1) Please place your changed slippers neatly in the designated area.
(2) Place the clean and well-packaged CleanRoom clothing/shoes/hats in your personal closet.
(3) Cleanroom clothing in use should be neatly hung on the hanger of the Clean Booth (HEPA) to maintain high cleanliness.
(4) When changing into cleanroom clothing, try to avoid the clothing from touching the ground.
(5) When wearing a net hat, try to cover your hair and ears and do not expose them.
(6) Zippers of cleanroom clothing should be pulled to the bottom; buttons should be fastened; Velcro should also be attached.
(7) Cleanroom clothing should be worn with moderate tightness, not too loose or too tight (a belt can be used to adjust the tightness).
(8) If a cleanroom clothing is damaged, it should not be worn any more and should be repaired before use (if it cannot be repaired, it should be scrapped and replaced with a new one).
(9) When wearing cleanroom shoes, socks should be worn to maintain personal hygiene.
(10) When wearing cleanroom shoes, the whole foot should be worn and the heel should not be stepped on.
(11) After putting on cleanroom clothing, the trouser legs of casual clothes should not be exposed and should be covered in cleanroom clothing.
(12) The mask should cover the mouth and nose and not expose them.
(13) The gloves should be completely stuffed into the cuffs of the cleanroom clothing.
(14) When wearing cleanroom clothing or wearing masks and gloves, do not wear them while walking.
(15) The cap should be pressed inside the cleanroom clothing and the brim should not be exposed.
(16) Do not doze off in the cleanroom.
(17) In principle, the replacement frequency of net caps, masks and gloves is as follows:
The net cap should be replaced once a week. If it is dirty or damaged, it should be replaced immediately.
The mask should be replaced every 2 days. If it is dirty or damaged, it should be replaced immediately (disposable paper masks should be replaced every time you go in and out).
The gloves should be replaced every time you go in and out. If they are dirty or damaged, they should be replaced immediately.
Finger gloves should be replaced every two hours. If they are dirty or damaged when entering or leaving the factory, they should be replaced immediately (due to the special working conditions of the patch station, the finger gloves need to be replaced every half an hour).
(Figure 4: Clean room environment)
4.11 Check the top of the clean clothes before wearing them
Before wearing the clean clothes and entering the air shower, you should check the following items in front of the mirror:
(1) Hair and net hat should not be exposed.
(2) Mouth and nose should not be exposed.
(3) Trousers should not be exposed (except for coat-style anti-static robes).
(4) Clean clothes and shoes should not be damaged or dirty.
(5) Zippers, buttons, magic sticky tape, etc. of clean clothes and shoes should be pulled up and not loose.
(6) The edge of the gloves should not be exposed.
(7) The identification name tags of clean clothes and hats should be fitted and fixed securely. (This does not apply to new employees who do not have identification name tags yet)
(8) The brim of the shawl and hat should not be exposed.
4.12 General prohibitions and precautions for clean rooms
(1) Those who have not obtained the clean room entry qualification are not allowed to enter the clean room.
(2) It is strictly forbidden to touch the product with bare hands.
(3) Forms, run cards, record books, etc. should be filled out carefully and accurately. Any changes must be signed and dated next to them.
(4) Gloves should be kept dry and clean, and no writing should be done on the gloves.
(5) It is strictly forbidden to sit or lie on the table, footrest, floor, trash can, guardrail, or lean against the machine or storage cabinet.
(6) If your hands are prone to sweating or allergies, you can wear fine cotton gloves first and then PVC gloves or latex gloves.
(7) You should pay attention to various announcements and slogans at all times.
(8) You should actively support each other, but you should not operate uncertified machines alone.
(9) Everyone should ban and correct personnel, items, signs, etc. that do not meet the regulations at any time, and notify the relevant supervisor.
(10) You should always pay attention to not exposing your hair, mouth, and nose.
(11) Do not place clean clothes, hats, etc. on the floor at will.
(12) Wearing and removing dust-free clothing can only be done in the dressing room, not in other places.
(13) The front and rear doors of the air shower cannot be opened at the same time.
(14) Running, playing, making noise, sleeping, etc. are strictly prohibited in the dust-free room.
(15) Eating or drinking is strictly prohibited in the dust-free room.
(16) Avoid gathering of many people in the dust-free room to avoid the production of particles.
(17) Do not enter the dust-free room immediately after strenuous exercise or sweating. Wait until your breathing is stable and you are no longer sweating before entering.
(18) If you smoke, you must wait 30 minutes after smoking and wash your hands and rinse your mouth before entering.
Dust-free products should not be brought into the dust-free room.
(19) General paper, notebooks, cartons, toilet paper, books, pencils, correction fluid, erasers, etc. are not allowed in front of the panel.
(20) Grinding, filing, sawing, sandpaper, abrasives, etc. are strictly prohibited in the dust-free room.
(21) People working in the clean room should keep their hair and body clean and wash regularly.
(22) People entering the clean room are prohibited from using perfume, lipstick, hairspray and other cosmetics. If they wear makeup, they should remove it before entering.
(23) Raw materials entering the clean room must be unpacked and wiped clean outside before entering the clean room.
(24) Do not talk in the chamber facing the product, cassette or machine.
(25) Even if you are wearing gloves or finger cots, you must reduce unnecessary contact with the product.
(26) Documents, semi-finished products, items or production tools in the clean room cannot be taken out without the permission of the department manager.
(27) Do not pull down the mask when talking.
(28) When using the telephone in the clean room, make your calls brief and to the point, and do not occupy the line:
(29) There should be no obstacles in the escape route of the clean room.
(30) Products, chemicals, cassettes, tools, documents, record books, etc. in the clean room should be placed neatly.
(31) Before entering the air shower, both feet should step on the sticky mat to remove the dirt on the soles of the clean shoes.
(32) The correct action in the air shower is to raise both hands and slowly rotate the body (at least three times).
(33) Each air shower has a specified number of people, which should not be exceeded. If there are too many people, they should enter in batches.
(34) The safety door is only used in emergency situations. It is strictly forbidden to enter and exit the factory through the safety door at ordinary times.
(35) Clean clothes/shoes should not be worn outside the clean room, and anti-static shoes should not be worn outside the factory.
4.13 Special attention to the yellow light room
(1) There should be no more than 5 people in the yellow light room.
(2) When entering the yellow light room, you must use an air shower.
(3) Be careful when using the light source to avoid affecting the light process.
(4) During production, no interfering factors that affect temperature/humidity can enter.
(5) Do not walk around or enter and exit the room unless necessary.
4.14 Things to note for guests (vendors) entering the clean room
You must apply for permission before entering the clean room and be accompanied by relevant personnel.
(1) Guests must be accompanied by relevant personnel throughout their activities in the clean room.
(2) Photography or photo taking is not allowed in the clean room.
(3) Do not bring prohibited items into the clean room.
(4) Guests must wear special clean clothes (yellow) when entering the clean room.
(5) Long clean shoe covers must be worn when entering areas A and B, and non-woven shoe covers must be worn when entering areas C, D, E, and F.
(6) Guests or vendors entering the clean room are not allowed to touch or operate the machines without permission.
(Figure 5: Cleanroom Safety Precautions)
4.15 Safety precautions for cleanrooms
(1) Before operating a machine, you must first be certified and obtain the operating qualification before you can operate the machine independently.
(2) For special operations, please strictly follow the relevant regulations of the operating specifications.
(3) When oil, water, chemicals and other liquids are spilled on the ground (desktop) or machine, they should be cleaned up quickly to avoid danger.
(4) Aisles should be kept unobstructed to avoid blocking escape routes.
(5) Flammable items should not be stored in the clean room. If they are required for work, safety protection measures must be taken.
(6) Various safety measures in the machine or clean room cannot be arbitrarily closed or by-passed. If damaged, they should be repaired quickly.
(7) If a staff member finds any behavior, items, conditions, etc. that endangers safety, in addition to taking necessary measures immediately, he should also report to his supervisor as soon as possible.
(8) At work, you should always pay attention to various safety warning signs or notice signs and strictly abide by them.
(9) First aid kits, fire extinguishers, oxygen cylinders and other safety, emergency and firefighting equipment must be placed in designated locations.
(10) Bottle caps of various cleaning liquids, organic solvents, chemicals, etc. should be closed immediately after use.
(11) When carrying out construction or maintenance in A Clean Room, if there is any high-altitude operation, fire or other special operations, you should first obtain permission from the safety department and notify the production line.
(12) Avoid working alone in a clean room.
(13) All machines, instruments and other electrical equipment should be grounded and insulated.
(14) When operating high-energy light sources such as lasers, do not look directly at the light source to avoid danger.
(15) All safety gear and equipment should be checked daily and kept ready for use at any time.
4.16 Clean room environmental condition control
(1) Panel front section
Temperature control range: T=(23+1)℃
Humidity control range: (50+5).RH
(2) Panel rear section
General environment area temperature control range: T<25℃:
Humidity control range: (62.5+17.5).RH;
Clean room temperature control range: T=(23±2)℃:
Humidity control range: (62.5+17.5).RH
(3) Module
General environment area temperature control range: T<25℃:
Humidity control range: (65+15).RH:Clean room temperature control range: T=(23+2)℃:
Humidity control range: (65±15).RH
