What are the main inspection items of clean room?

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Clean room inspection items

Serial number	project	One-way flow		Non-unidirectional flow	Enforcement
Serial number	project	1~4level 5level		6~9level	Enforcement
1	Air volume supplied by the vent (total Air volume supplied by the system if necessary)	Unexpected		Must test	E1
2	Room or system fresh air volume	Must test			E1
3	Room exhaust volume	Negative pressure clean room must be tested			E1
4	Indoor cross-sectional Wind speed	Must test		Unexpected	E1
5	Wind speed unevenness	Must test	If necessary, measure	If necessary, measure	E3
6	Air velocity at the air outlet or specific boundary	Unexpected		If necessary, measure	E1
7	Static pressure difference	Must test			E2
8	Cleanliness at 0.6m inside the door after opening	Must test		Unexpected	E2
9	Wind speed at the opening	If necessary, measure			E2
10	Formaldehyde concentration in the room	If necessary, measure			E13
11	Ammonia concentration in the room	If necessary, measure			E14
12	Ozone concentration in the room	If necessary, measure			E15
13	Carbon dioxide concentration in the room	If necessary, measure			E16
14	Supply air high efficiency filter scanning and leak detection	Must test			D2、E3
15	Exhaust air high efficiency filter scanning and leak detection	Biological clean room must be tested			D2、E3
16	Air cleanliness level	Must test			E4
17	Surface cleanliness level	If necessary, measure		Unexpected	The standard is selected by negotiation between the client and the inspector.
18	Temperature	Must test			E5
19	Relative humidity	Must test			E5
20	Temperature and humidity fluctuation range	If necessary, measure			E5.2

21	Regional temperature difference and regional humidity difference	If necessary, measure		E5.2
22	Noise	Must test		E6
23	Illumination	Must test		E7
24	Microvibration	If necessary, measure		G2~4
25	Surface static electricity	If necessary, measure		E10
26	Surface static electricity	If necessary, measure		E9
27	Airflow pattern	Unexpected	If necessary, measure	E12.1
28	Directional flow	Unexpected	If necessary, measure	E12.2
29	Streamline parallelism	If necessary, measure	Unexpected	E12.3
30	Self-cleaning time	If necessary, measure		E11
31	Molecular pollutants	If necessary, measure If necessary, measure		H2
32	Floating or settling bacteria	Clean rooms with microbial concentration parameter requirements must test E8.2~3		E8.2~3
33	Surface contamination density	If necessary, measure		E8.4
34	Biological evaluation	If necessary, measure		F1~3

Inspection items	Applicable level	Maximum inspection time interval
Air supply volume	6~9level	12 months
High efficiency filter scan for leak detection at air supply port	All Levels	24 months
High efficiency filter scan for leak detection at exhaust air	All Levels	12 months
Cross-sectional wind speed	^1~5level	12 months
Fresh air volume	All Levels	12 months
Exhaust air volume	All Levels	12 months
Static pressure difference	All Levels	12 months
Cleanliness at 0.6m inside the door	1~5level	12 months
Air cleanliness	1~5level	24 months
Air cleanliness	6~9level	12 months
Formaldehyde concentration	All Levels	24 months
Temperature and humidity	All Levels	12 months
Noise	All Levels	12 months
Illumination	All Levels	12 months
Floating or settling bacteria	All Levels	6 months

Inspection items	Applicable level	Maximum inspection time interval
Unevenness of wind speed	1~4level	12 months
Wind speed at air outlet or specific boundary	6~9level	12 months
Wind speed at tunnel outlet	All Levels	12 months
Temperature and humidity fluctuation range and regional differences	All Levels	12 months or dynamic monitoring
Micro-vibration	All Levels	24 months
Surface static electricity	All Levels	24 months
Airflow pattern	6~9level	Unlimited
Directional flow	6~9level	12 months
Streamline parallelism	1~5level	Unlimited
Self-cleaning time	5~9level	24 months
Enclosure tightness	On request	Unlimited
Surface contamination density	All Levels	6 months
Biological evaluation	All Levels	Unlimited
Molecular pollutants	1~4level	12 months
Surface cleanliness	1~5level	12 months
Ammonia concentration	All Levels	24 months
Ozone concentration	All Levels	Unlimited
Carbon dioxide concentration	All Levels	3 months

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