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Cleanroom Complete Performance Diagnostic Instructions

  • Author:Jason Peng

  • Cleanroom Engineering Technology Manager of Deiiang Company.

    Product R&D Manager of GDC Inc. Cleanroom Equipment Manufacturing Company.

    Executive Director of Guangdong Cleanroom Industry Association of China.

    Engaged in R&D of related products for 15 years, with rich relevant technical experience

  • 2024-11-19  |  Visits:


Cleanroom system environmental parameter diagnosis

  • Air volume: Air volume test, Ventilation frequency verification

  • Cleanliness: personnel, raw material in and out pollution analysis, production equipment dust analysis, cleanliness status analysis of each area

  • Pressure difference: pressure difference test and analysis of each purification room (area)

  • Temperature and humidity: spatial distribution temperature and humidity test, time (24 hours) distribution temperature and humidity test

  • Noise: noise test and analysis

  • Fungus: floating bacteria and settling bacteria test and analysis

  • Light: yellow light area spectrum analysis

  • Static electricity: static electricity test and analysis

  • Airflow pattern: airflow pattern analysis, smoke tracer filming


Cleanroom system equipment performance diagnosis

  • Advanced instruments are used to test and analyze each system equipment.

  • Ventilation and air conditioning units, exhaust units, and dust removal units are subject to: working condition analysis, speed head measurement, filter filtration grade applicability re-evaluation, control system analysis, air volume (supply, return and fresh air) test and analysis, motor insulation test.

  • Water pumps are subject to: water flow test, hydraulic balance, insulation test.Analysis of chemical equipment maintenance: maintenance structure sealing inspection, filter filter composition analysis.

  • High-purity gas: pipeline cleanliness test, dew point test, ammonia test, pressure holding test, oil content test.

Facing the yield rate and pollution sources, we have established a legal clean environment performance evaluation and diagnosis system.

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Clean rooms have now become an important part of the production and experimental activities of high-tech enterprises, and "continuous pollution control" and fighting against particles have become an important task of clean room maintenance. As the environment (clean room) of the five elements of people, machines, materials, methods, and environment directly affects the yield rate of products, and the performance of clean rooms also directly determines the improvement of the enterprise's yield rate or the success of experiments. Providing a comprehensive and objective test and evaluation of the performance of the clean room can provide a useful reference for the maintenance of the clean room. The clean environment performance evaluation and diagnosis system is an important measure to promote the improvement of the clean room environment.

Based on the first-hand data of on-site testing and monitoring, and referring to the clean environment performance evaluation and diagnosis system, starting from the management, monitoring, maintenance and previous design, rectification and other aspects of the clean room, combined with the needs of the actual production department, a set of scientific, objective, fair, comprehensive and feasible performance evaluation and diagnosis indicators are provided for the series of problems existing in the current clean room. The cleanliness, ventilation times, pressure difference, airflow directionality, etc. of the environment are accurately and authoritatively tested to assess the pollution risk.

The clean room is composed of multiple systems, and the maintenance process is also the joint work of multiple professions.

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Due to the declining product yield and the increasingly stringent standards such as GMP, the changes in equipment working conditions and the aging of equipment, the comprehensive performance of the clean room has gradually decreased, and some parameters no longer meet the design, specification and applicable requirements. Therefore, under the premise of reducing investment, meeting relevant needs and extending the service life of the clean room, implementing the comprehensive performance diagnosis of the clean room and starting to improve it is an economical and reasonable way to improve the clean environment. The detection of equipment and indoor parameter performance is a prerequisite for collecting on-site data. On-site investigation, testing and experimental research analyze its comprehensive operating status, identify existing and potential problems, and use them as the basis and data support for improvement. At the same time, improvement and rectification plans are proposed.

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